Semiconductor · Microelectronics
Integrated circuit industry water reuse equipment, semiconductor chip water reuse, wastewater recovery
一. 設(shè)備簡(jiǎn)介
1、 Equipment introduction
國(guó)內(nèi)半導(dǎo)體行業(yè)近幾年來(lái)的發(fā)展令人注目,特別是大型芯片制造企業(yè)在東南沿海地區(qū)蓬勃發(fā)展。芯片制造過(guò)程中要消耗大量的水,同時(shí)使用大量的化學(xué)試劑和特殊氣體,排放的廢水中成分復(fù)雜,因此如何選擇廢水處理系統(tǒng),使廢水處理達(dá)標(biāo),并降低其處理費(fèi)用,同時(shí)充分做好中水回用,降低單位產(chǎn)品的能耗,節(jié)約水資源,是我們的研究重點(diǎn)。
The development of domestic semiconductor industry in recent years has attracted great attention, especially the large-scale chip manufacturing enterprises in southeast coastal areas. In the process of chip manufacturing, a large amount of water is consumed, and a large number of chemical reagents and special gases are used. The composition of the discharged wastewater is complex. Therefore, how to select wastewater treatment system to make the wastewater treatment meet the standard and reduce its treatment cost, and to fully reuse water, reduce the energy consumption of unit products and save water resources are our research focus.
宏潔水務(wù)的中水回用設(shè)備工藝已采用膜處理技術(shù),包括預(yù)處理、超濾系統(tǒng)和反滲透(RO)系統(tǒng)及EDI系統(tǒng)(可選)幾部分。由于廢水通過(guò)現(xiàn)代技術(shù)的深度處理能夠達(dá)到生產(chǎn)用水標(biāo)準(zhǔn)或者生活雜用水標(biāo)準(zhǔn),使廢水能夠循環(huán)使用,這樣企業(yè)對(duì)于廢水這一塊的整體運(yùn)行費(fèi)用得到大|大的降低,對(duì)環(huán)境保護(hù)起到很大的作用。
The water reuse equipment technology of macro clean water has adopted membrane treatment technology, including pretreatment, ultrafiltration system, RO system and EDI system (optional). Because the wastewater can meet the production water standard or the standard of domestic miscellaneous water through the advanced treatment of modern technology, the wastewater can be recycled. Therefore, the enterprise can greatly reduce the overall operation cost of the waste water, which plays a great role in environmental protection.
二. 設(shè)計(jì)標(biāo)準(zhǔn)及依據(jù)
2、 Design standard and basis
1. 根據(jù)用戶(hù)提供的詳細(xì)水質(zhì)報(bào)告“量身定制”。
1. According to the detailed water quality report provided by the user, "customized".
2. 水處理設(shè)備技術(shù)條件《JB/T 2932-1999》
2. Technical conditions of water treatment equipment JB / T 2932-1999
3. 用于一般景觀生態(tài)用水符合(CJ/T95-2000),
3. the water used for general landscape ecology meets the requirements (cj/t95-2000),
4. 用于生活雜用水應(yīng)符合建設(shè)部(CJ/48-1999),
4. the water used for domestic miscellaneous water shall conform to the Ministry of construction (cj/48-1999),
5. 用于工業(yè)循環(huán)冷卻水應(yīng)符合(GB/T50102-2003).
5. the cooling water used for industrial circulation shall conform to gb/t50102-2003
6. 反滲透水處理設(shè)備標(biāo)準(zhǔn)《CJ/T119-2000》
6. standard for reverse osmosis water treatment equipment cj/t119-2000
7. 低壓開(kāi)關(guān)設(shè)備和控制設(shè)備成套裝置《IEC439-1 》
7. complete set of low voltage switchgear and control equipment iec439-1
三. 工藝流程
3、 Process flow
四. 設(shè)計(jì)特點(diǎn)
4、 Design features
1. 系統(tǒng)采用全自動(dòng)控制(同時(shí)亦可采用手動(dòng)控制),系統(tǒng)運(yùn)行時(shí)可設(shè)定自動(dòng)反洗、再生程序;
1. The system adopts full automatic control (manual control is also available), and automatic backwashing and regeneration procedures can be set during system operation;
2. 管道一般采用UPVC材質(zhì);
2. UPVC is generally used for the pipeline;
3. 集成控制系統(tǒng)和集成儀表系統(tǒng)等,方便操作管理;
3. integrated control system and integrated instrument system, etc., which is convenient for operation and management;
4. 設(shè)備具有耗材更換自動(dòng)提示功能,并且耗材的更換周期取決于水質(zhì)和壓力的變化,而非根據(jù)耗材的使用時(shí)間,考慮到了各地水質(zhì)的差異,設(shè)計(jì)更;
4. the equipment has the function of automatic prompt for consumables replacement, and the replacement cycle of consumables depends on the change of water quality and pressure, rather than considering the difference of water quality in different places according to the usage time of consumables, the design is more important;
5. 能有效地進(jìn)行固液分離,將廢水中的懸浮物質(zhì)、膠體物質(zhì)、生物單元流失的微生物菌群與已凈化的水分開(kāi)。分離工藝簡(jiǎn)單,占地面積小,出水水質(zhì)好,一般不須經(jīng)三級(jí)處理即可回用。
5. it can effectively separate the suspended substances, colloidal substances and microbial flora lost by biological units from purified water. The separation process is simple, the floor area is small, the effluent quality is good, and it can be reused without three-stage treatment.
6. 可使生物處理單元內(nèi)生物量維持在高濃度,使容積負(fù)荷大|大提高,使處理單元水力停留時(shí)間大|大的縮短,生物反應(yīng)器的占地面積相應(yīng)減少。
6. the biomass in the biological treatment unit can be maintained at high concentration, the volume load is greatly increased, the hydraulic retention time of the treatment unit is greatly shortened, and the occupied area of the bioreactor will be reduced accordingly.
7. 由于可防止各種微生物菌群的流失,有利于生長(zhǎng)速度緩慢的(硝化等)的生長(zhǎng),從而使系統(tǒng)中各種代謝過(guò)程順利進(jìn)行。
7. it can prevent the loss of various microbial groups, and it is conducive to the slow growth (nitrification, etc.) growth, so that the metabolism process in the system can be smoothly carried out.
8. 使一些大分子難降解物的停留時(shí)間變長(zhǎng),有利于它們的分解。
8. it is beneficial to the decomposition of some macromolecular refractory compounds by making their residence time longer.
9. 膜處理技術(shù)與其它的過(guò)濾分離技術(shù)一樣,在長(zhǎng)期的運(yùn)轉(zhuǎn)過(guò)程中,膜作為一種過(guò)濾介質(zhì)堵塞,膜的通過(guò)水量運(yùn)轉(zhuǎn)時(shí)間而逐漸下降有效的反沖洗和化學(xué)清洗可減緩膜通量的下降,維持MBR系統(tǒng)的有效使用壽命。
9. membrane treatment technology is similar to other filtration separation technologies. In the long-term operation, the membrane is blocked as a filter medium. The effective backwashing and chemical cleaning can slow down the decline of membrane flux and maintain the effective service life of MBR system.