一． 設(shè)備簡介

1、 Equipment introduction

半導(dǎo)體超純水設(shè)備是應(yīng)用于半導(dǎo)體生產(chǎn)零件清洗的超純水設(shè)備，需要符合特定的用水水質(zhì)標(biāo)準(zhǔn),半導(dǎo)體超純水設(shè)備出水水質(zhì)要符合美國ASTM純水水質(zhì)標(biāo)準(zhǔn)、中國電子工業(yè)電子級水質(zhì)技術(shù)標(biāo)準(zhǔn)(18MΩ.cm、15MΩ.cm、10MΩ.cm、2MΩ.cm、0.5MΩ.cm)、半導(dǎo)體工業(yè)用純水指標(biāo)、集成電路水質(zhì)標(biāo)準(zhǔn)。 宏潔水務(wù)在滿足用戶用水標(biāo)準(zhǔn)的基礎(chǔ)上，在設(shè)備系統(tǒng)中水箱均設(shè)有液位控制系統(tǒng)、水泵均設(shè)有壓力保護(hù)裝置、在線水質(zhì)檢測控制儀表、電氣采用PLC可編程控制器，真正做到了無人職守，同時(shí)在工藝選材上采用推薦和客戶要求的方法，使設(shè)備與其它同類產(chǎn)品相比較，具有更高的性價(jià)比和設(shè)備可靠性。

Semiconductor ultra pure water equipment is a super pure water equipment used for cleaning semiconductor production parts. It needs to meet specific water quality standards. The effluent quality of semi-conductor ultra pure water equipment shall meet the American ASTM pure water quality standard and the electronic grade water quality technical standard of China Electronic Industry (18m) Ω. cm、15M Ω. cm、10M Ω. cm、2M Ω. cm、0.5M Ω. Cm), pure water index for semiconductor industry, and water quality standard of integrated circuit. On the basis of meeting the user's water use standard, Hongjie water has set up liquid level control system in the water tank of the equipment system, pressure protection device in the water pump, online water quality detection and control instrument, and PLC programmable controller in the electrical system, so that no one is on duty. At the same time, the method of recommendation and customer requirements is adopted in the process of material selection, so that the equipment is compared with other similar products, It has higher cost performance and equipment reliability.

二． 設(shè)計(jì)標(biāo)準(zhǔn)及依據(jù)

2、 Design standard and basis

1. 根據(jù)用戶提供的詳細(xì)水質(zhì)報(bào)告“量身定制”。

1. According to the detailed water quality report provided by the user, "customized".

2. 水處理設(shè)備技術(shù)條件《JB/T 2932-1999》

2. Technical conditions of water treatment equipment JB / T 2932-1999

3. 反滲透水處理設(shè)備標(biāo)準(zhǔn)《CJ/T119-2000》

3. Standard for reverse osmosis water treatment equipment CJ / t119-2000

4. 低壓開關(guān)設(shè)備和控制設(shè)備成套裝置《IEC439-1 》

4. Complete set of low voltage switchgear and control equipment iec439-1

5. 實(shí)驗(yàn)室超純水技術(shù)指標(biāo)標(biāo)準(zhǔn)《GB6682-2008 》

5. Technical index standard of laboratory ultra pure water gb6682-2008

6. 電子級超純水規(guī)格《GB/T11446.1-1997》

6. Electronic grade ultra pure water specification GB / t11446.1-1997

三． 工藝流程

3、 Process flow

1、 原水－原水加壓泵－多介質(zhì)過濾器－活性炭過濾器－軟水器－精密過濾器－級反滲透－PH調(diào)節(jié)－中間水箱－級反滲透－純化水箱－純水泵－EDI系統(tǒng)－超純水箱－純水泵－拋光裝置－終端超濾－用水點(diǎn)

1. Raw water - raw water pressure pump - multi-media filter - activated carbon filter - water softener - precision filter - stage reverse osmosis - pH regulation - intermediate water tank - stage reverse osmosis - purified water tank - pure water pump EDI system - ultra pure water tank pure water pump polishing device terminal ultrafiltration water point

四． 設(shè)計(jì)特點(diǎn)

4、 Design features

1. 系統(tǒng)采用全自動(dòng)控制(同時(shí)亦可采用手動(dòng)控制），系統(tǒng)運(yùn)行時(shí)可設(shè)定自動(dòng)反洗、再生程序；

1. The system adopts full automatic control (manual control is also available), and automatic backwashing and regeneration procedures can be set during system operation;

2. 各單元接線均在工廠內(nèi)完成，減少安裝調(diào)試時(shí)間；

2. The wiring of each unit is completed in the factory to reduce the installation and debugging time;

3. 一級反滲透和二級反滲透設(shè)有回流管道，反滲透設(shè)備設(shè)有化學(xué)清洗裝置；

3. The primary RO and secondary ro are equipped with return pipes, and the RO equipment is equipped with chemical cleaning device;

4. 管道一般采用UPVC材質(zhì)；

4. UPVC material is generally used for pipes;

5. 集成控制系統(tǒng)和集成儀表系統(tǒng)等，方便操作管理；

5. Integrated control system and instrument system to facilitate operation and management;

6. RO膜定時(shí)清洗 具有開機(jī)和定時(shí)清洗RO

6. RO film timing cleaning has startup and regular cleaning ro